Thin, Super Uniform Thickness Wafers |
Fluid Jet polishing has enabled LightMachinery to produce large thin optics with less than 10nm of thickness variation. These techniques can be applied to a wide variety of optical and semiconductor materials including Fused Silica, BK7, Silicon, Silicon on Insulator, SOI, Germanium, Zinc Selenide, Calcium Fluoride and Magnesium Fluoride. Conventional polishing relies on controlling the shape of a polishing lab to adjust the entire surface of an optical element. In the hands of one of LightMachinery's master polishers, conventional hand polishing can achieve remarkable results but it has limitations. Conventional polishing can only adjust the basic parameters of wedge, sphere and astigmatism. Fluid jet polishing utilizes a small computer controlled polishing tool that removes material in a very slow but predictable pattern. Advanced software developed by LightMachinery enables the correction of wavefront errors to remove nanometers of material and achieve surfaces that are very close to perfect. Fluid jet polishing is enabling optical, nanostructural, microfluidics, Silicon on Insulator (SOI), MEMS, and semiconductor projects that were previously considered to be impossible. If your application requires truly flat smooth surfaces, uniform thickness or surfaces with arbitrary aspheric shapes then contact us to discuss your needs
|
|
|
Features |
Applications |
Standard
Specifications |
Technology |
VIPA is a special type of Fabry-
A single input beam is converted to a series of parallel output beams of gradually decreasing intensity. These beams will constructively interfere at an angle that depends on the wavelength. Placing a lens between the VIPA and an array detector (CCD or similar) allows recording of a spectrum of the input light. Each subsequent beam has a precise increase in phase and fixed lateral displacement, hence “phase array”.
There are several parameters that define the performance of a VIPA. The first is its optical thickness. For a solid etalon this is OPD=2ntcos(?), where n is the refractive index, t is the thickness, and ? is the angle from normal within the VIPA. From the optical thickness, the free spectral range (FSR) is approximately c/OPD. Analogous to a regular etalon, the angular dispersion of the VIPA output will repeat every time the input frequency (or wavelength) increases by 1 FSR.
The second important parameter is the reflectance of the output mirror. In principle, a higher reflectance mirror will increase the resolving power of the VIPA. We have optimized the partial reflectivity for each wavelength range to maximize finesse; finesse greater than 100 has been achieved for visible/NIR applications. In other words, it will be possible to distinguish wavelengths separated by 1/100th of the FSR.
The third important parameter is the internal angle of the light traveling through the VIPA. Smaller angles increase the angular dispersion, but there are a couple of factors that put a lower limit on this angle. The first reflection from the partial reflector must be fully incident on the high reflector so a narrower transition between the antireflection coating and the high reflector enables a smaller angle. Our VIPAs have a transition width of only 2-
The VIPA coatings must be selected to match the wavelength range of interest, and the substrate material must also be transparent. The LightMachinery catalog VIPAs are all made of fused silica. Customized designs using calcium fluoride or silicon allow operation further into the infra-
Part Number |
VIPA |
Details |
.5/cm (15GHz) |
.5/cm (15GHz) , 415nm to 500nm, typical finesse 56 |
|
.5/cm (15GHz) |
.5/cm (15GHz) , 500nm to 600nm, typical finesse ~64 |
|
.5/cm (15GHz) |
.5/cm (15GHz) , 600nm to 725nm, typical finesse ~68 |
|
.5/cm (15GHz) |
.5/cm (15GHz) , 680nm to 800nm, typical finesse ~71 |
|
.5/cm (15GHz) |
.5/cm (15GHz) , 725nm to 875nm, typical finesse ~72 |
|
.5cm (15GHz) |
.5/cm (15GHz) , 875nm to 1050nm, typical finesse ~78 |
|
.5cm (15GHz) |
.5/cm (15GHz) , 1050nm to 1260nm, typical finesse ~85 |
|
.5cm (15GHz) |
.5/cm (15GHz) , 1260nm to 1500nm, typical finesse ~93 |
|
.5cm (15GHz) |
.5/cm (15GHz) , 1500nm to 1700nm, typical finesse ~100 |
|
1/cm (30GHz) |
1/cm (30GHz) , 415nm to 500nm, typical finesse 56 |
|
1/cm (30GHz) |
1/cm (30GHz) , 500nm to 600nm, typical finesse ~64 |
|
1/cm (30GHz) |
1/cm (30GHz) , 600nm to 725nm, typical finesse ~68 |
|
1/cm (30GHz) |
1/cm (30GHz) , 680nm to 800nm, typical finesse ~71 |
|
1/cm (30GHz) |
1/cm (30GHz) , 725nm to 875nm, typical finesse ~72 |
|
1/cm (30GHz) |
1/cm (30GHz) , 875nm to 1050nm, typical finesse ~78 |
|
1/cm (30GHz) |
1/cm (30GHz) , 1050nm to 1260nm, typical finesse ~85 |
|
1/cm (30GHz) |
1/cm (30GHz) , 1260nm to 1500nm, typical finesse ~93 |
|
1/cm (30GHz) |
1/cm (30GHz) , 1500nm to 1700nm, typical finesse ~100 |
|
2/cm (60GHz) |
2/cm (60GHz) , 415nm to 500nm, typical finesse 56 |
|
2/cm (60GHz) |
2/cm (60GHz) , 500nm to 600nm, typical finesse ~64 |
|
2/cm (60GHz) |
2/cm (60GHz) , 600nm to 725nm, typical finesse ~68 |
|
2/cm (60GHz) |
2/cm (60GHz) , 680nmto 800nm, typical finesse ~71 |
|
2/cm (60GHz) |
2/cm (60GHz) , 725nm to 875nm, typical finesse ~72 |
|
2/cm (60GHz) |
2/cm (60GHz) , 875nm to 1050nm, typical finesse ~78 |
|
2/cm (60GHz) |
2/cm (60GHz) , 1050nm to 1260nm, typical finesse ~85 |
|
2/cm (60GHz) |
2/cm (60GHz) , 1260nm to 1500nm, typical finesse ~93 |
|
2/cm (60GHz) |
2/cm (60GHz) , 1500nm to 1700nm, typical finesse ~100 |
|
Datasheets |
Manuals |
Technical Papers |
Video Links |
Page Links |